Fabrication Methods for Microscale 3D Structures on Silicon Carbide
Younghak Cho, Jihong Hwang, Min Soo Park, Bo Hyun Kim
Topics & Concepts
Microscale chemistrySilicon carbideMaterials scienceFabricationNanotechnologyEtching (microfabrication)Isotropic etchingCarbideSiliconSemiconductorWide-bandgap semiconductorThermalEngineering physicsOptoelectronicsComposite materialEngineeringPathologyMeteorologyAlternative medicineLayer (electronics)MedicineMathematicsMathematics educationPhysicsAdvanced ceramic materials synthesisAluminum Alloys Composites PropertiesSilicon Carbide Semiconductor Technologies