Sputtering thin films: Materials, applications, challenges and future directions
Renuka Garg, Spandana Gonuguntla, Saddam Sk, Muhammad Saqlain Iqbal, Adewumi O. Dada, Ujjwal Pal, Mohsen Ahmadipour
Topics & Concepts
SputteringMaterials scienceThin filmNanotechnologyEngineering physicsPhysicsSemiconductor materials and devicesElectronic and Structural Properties of OxidesZnO doping and properties