Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films
Linda Aissani, Mamoun Fellah, Ahlam Belgroune, Aleksei Obrosov, Mohammed Abdul Samad, Akram Alhussein
Topics & Concepts
Materials scienceNanoindentationZirconium nitrideMicrostructureWettingScanning electron microscopeVolumetric flow rateThin filmSputter depositionComposite materialContact angleAnalytical Chemistry (journal)SputteringTribologyOxygenMetallurgyNitrideNanotechnologyLayer (electronics)Titanium nitridePhysicsOrganic chemistryChemistryQuantum mechanicsChromatographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices