Review of physicochemical-assisted nanomanufacturing processes for wide-bandgap semiconductor wafers
Kazuya Yamamura, Hui Deng, Yasuhisa Sano, Junji Murata, Xu Yang, Rongyan Sun
Topics & Concepts
NanomanufacturingSemiconductorWaferMaterials scienceNanotechnologyOptoelectronicsBand gapWide-bandgap semiconductorEngineering physicsEngineeringIon-surface interactions and analysisIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Surface Polishing Techniques