A Room Temperature ZnO-NPs/MEMS Ammonia Gas Sensor
Ting‐Jen Hsueh, Ruei-Yan Ding
Abstract
This study uses ultrasonic grinding to grind ZnO powder to 10−20-nanometer nanoparticles (NPs), and these are integrated with a MEMS structure to form a ZnO-NPs/MEMS gas sensor. Measuring 1 ppm NH3 gas and operating at room temperature, the sensor response for the ZnO-NPs/MEMS gas sensor is around 39.7%, but the origin-ZnO powder/MEMS gas sensor is fairly unresponsive. For seven consecutive cycles, the ZnO-NPs/MEMS gas sensor has an average sensor response of about 40% and an inaccuracy of <±2%. In the selectivity of the gas, the ZnO-NPs/MEMS gas sensor has a higher response to NH3 than to CO, CO2, H2, or SO2 gases because ZnO nanoparticles have a greater surface area and more surface defects, so they adsorb more oxygen molecules and water molecules. These react with NH3 gas to increase the sensor response.