Experimental investigation of the effects of vibration parameters on ultrasonic vibration-assisted tip-based nanofabrication
Zhilai Lu, Yanling Tian, Chunfeng Liu, Zhiyong Guo, Fujun Wang, Dawei Zhang, Bijan Shirinzadeh
Topics & Concepts
VibrationScratchNanolithographyAcousticsMaterials scienceAmplitudeControllabilityUltrasonic sensorOpticsPhysicsComposite materialFabricationMathematicsMedicineApplied mathematicsPathologyAlternative medicineForce Microscopy Techniques and ApplicationsNanofabrication and Lithography TechniquesAdvanced Surface Polishing Techniques