Ultra miniaturized InterDigitated electrodes platform for sensing applications
Z. Wang, Ahad Syed, Saurav Bhattacharya, X. Chen, U. Büttner, G. Iordache, K. Saláma, Theodore Ganetsos, E. Valamontes, Antonios Georgas, I. Raptis, Π. Οικονόμου, A. Botsialas, M. Sanopoulou
Topics & Concepts
MiniaturizationFabricationMaterials scienceSurface micromachiningMicroelectronicsWaferElectronicsNanotechnologyMicrofabricationTransducerOptoelectronicsCapacitanceElectrodeMultiphysicsElectrical engineeringFinite element methodChemistryEngineeringMedicineThermodynamicsAlternative medicinePathologyPhysical chemistryPhysicsAnalytical Chemistry and SensorsGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor Technologies