Wafer-scale, uniform and stable Mn-Co-Fe-Zn-O thin films for NTC thermistor and its application in heat flux detecting
Shuo Wang, Bo Yang, Xinmiao Wang, Zhaoyang Chen, Aimin Chang, Bo Gao, Wenwen Kong
Topics & Concepts
Thin filmThermistorMaterials scienceWaferSputter depositionSputteringTemperature coefficientAnalytical Chemistry (journal)Composite materialOptoelectronicsNanotechnologyElectrical engineeringChemistryEngineeringChromatographyElectrical and Thermal Properties of MaterialsAdvanced Sensor Technologies ResearchGas Sensing Nanomaterials and Sensors