Investigation of the nano and micromechanical performance of β-Ga2O3 epitaxial films on sapphire using nanoindentation
Jiawei Liu, Haoguo Deng, Xueping Zhao, Chong Wu, Hai Zhang, Fengchao Lang
Topics & Concepts
NanoindentationSapphireNano-EpitaxyMaterials scienceAtomic force microscopyOptoelectronicsNanotechnologyComposite materialOpticsLaserPhysicsLayer (electronics)Ga2O3 and related materialsZnO doping and propertiesElectronic and Structural Properties of Oxides