Nanocasting synthesis of mesoporous CeO2 particle abrasives from mesoporous SiO2 hard templates for enhanced chemical mechanical polishing performance
Yang Chen, Yifan Xia, Chao Wang, Jie Pan, Tianyu Wang, Ailian Chen
Topics & Concepts
Materials scienceMesoporous materialTemplatePolishingNanotechnologyParticle (ecology)Chemical-mechanical planarizationMesoporous organosilicaChemical engineeringMesoporous silicaMetallurgyCatalysisOceanographyBiochemistryChemistryEngineeringGeologyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMinerals Flotation and Separation Techniques