Micromachined piezoelectric sensor with radial polarization for enhancing underwater acoustic measurement
Xingxu Zhang, Zichen Cui, Hao Wu, Jian Luo, Tao Ye, Xiaobiao Shan, Tao Xie, Binghe Ma
Topics & Concepts
AcousticsPiezoelectricityUnderwaterMicroelectromechanical systemsMaterials scienceVoltageDiaphragm (acoustics)Polarization (electrochemistry)OpticsEngineeringElectrical engineeringVibrationOptoelectronicsPhysicsOceanographyGeologyPhysical chemistryChemistryAcoustic Wave Resonator TechnologiesUltrasonics and Acoustic Wave PropagationAdvanced MEMS and NEMS Technologies