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Growth and characterization of Ta-doped Ga2O3 films deposited by magnetron sputtering

Yi Shang, Ke Tang, Zhuorui Chen, Zhiluo Zhang, Jie Deng, Yan Hu, Keyun Gu, Meng Cao, Linjun Wang, Jian Huang

2021Materials Science in Semiconductor Processing34 citationsDOI

Topics & Concepts

Materials scienceX-ray photoelectron spectroscopyDopingSputter depositionSputteringSubstrate (aquarium)Electrical resistivity and conductivityLayer (electronics)Analytical Chemistry (journal)QuartzOptoelectronicsThin filmChemical engineeringComposite materialNanotechnologyChromatographyChemistryGeologyEngineeringOceanographyElectrical engineeringGa2O3 and related materialsZnO doping and propertiesSemiconductor materials and devices
Growth and characterization of Ta-doped Ga2O3 films deposited by magnetron sputtering | Litcius