A review of ultra-short pulse laser micromachining of wide bandgap semiconductor materials: SiC and GaN
Keran Jiang, Peilei Zhang, Shijie Song, Tianzhu Sun, Yu Chen, Haichuan Shi, Hua Yan, Qinghua Lu, Guanglong Chen
Topics & Concepts
Materials scienceOptoelectronicsSemiconductorWide-bandgap semiconductorSurface micromachiningLaserBand gapPulse (music)OpticsFabricationPathologyAlternative medicineMedicineDetectorPhysicsLaser Material Processing TechniquesDiamond and Carbon-based Materials ResearchSilicon Nanostructures and Photoluminescence