Wideband 6 GHz RF Filters for Wi-Fi 6E Using a Unique BAW Process and Highly Sc-doped AlN Thin Film
D. Kim, Gabriel Moreno, F.Z. Bi, Mary Winters, Rohan Houlden, D. Aichele, J.B. Shealy
Abstract
A Wi-Fi 6E BAW filter with relative bandwidth of 12% (665 MHz at 5.5 GHz) and good rejection over the whole 6 GHz band (1200 MHz) is reported. The Wi-Fi 6E filters have much wider bandwidth than those of early Wi-Fi 5/6 filters. High coupling coefficient piezoelectric films, highly doped AlScN, are developed to realize such a wide bandwidth. A novel bulk acoustic wave device fabrication process that capable of utilizing wide variety of piezoelectric thin films is used to realize such a challenging filter. The resonators fabricated with the material show k<inf>eff</inf><sup>2</sup> of 13.2% and maximum quality factor of 1789.
Topics & Concepts
Bandwidth (computing)ResonatorMaterials scienceWidebandFabricationOptoelectronicsCoupling coefficient of resonatorsElectromechanical coupling coefficientElectronic filterPiezoelectricityDopingQ factorBand-pass filterElectronic engineeringElectrical engineeringComputer scienceTelecommunicationsEngineeringComposite materialVoltagePathologyMedicineAlternative medicineAcoustic Wave Resonator TechnologiesAdvanced Fiber Optic SensorsMicrowave Engineering and Waveguides