Product quality research in the industrialized preparation of electronic grade polysilicon: A review of impurity sources and control strategies
Xingping Yuan, Lijie Guo, Qinghui Lv, Dan Zhao, Hua Liao, Wenhui Ma, Qingyun Jiang, Gang Xie, Yanqing Hou, Jinglei Shen
Topics & Concepts
ImpurityQuality (philosophy)Materials scienceProduct (mathematics)BusinessChemistryPhysicsMathematicsQuantum mechanicsOrganic chemistryGeometrySilicon and Solar Cell TechnologiesSemiconductor materials and interfacesSemiconductor materials and devices