Super-stealth dicing of transparent solids with nanometric precision
Zhen‐Ze Li, Hua Fan, Lei Wang, Xu Zhang, Xinjing Zhao, Yan‐Hao Yu, Yi‐Shi Xu, Yi Wang, Xiaojie Wang, Saulius Juodkazis, Qi‐Dai Chen, Hong‐Bo Sun
Topics & Concepts
Wafer dicingMaterials scienceBiophotonicsNanotechnologyOptoelectronicsOpticsPhotonicsPhysicsWaferNanofabrication and Lithography TechniquesLaser Material Processing TechniquesAdvanced Surface Polishing Techniques