Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD
Xubing Wei, Lin Chen, Minglan Zhang, Zhibin Lu, Guangan Zhang
Topics & Concepts
Materials scienceDopingPlasma-enhanced chemical vapor depositionDopantDiamond-like carbonHydrogenComposite materialThin filmChemical engineeringNanotechnologyOptoelectronicsChemistryEngineeringOrganic chemistryDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives