High-throughput membrane deflection characterization of shape memory alloy thin films
Zhuo Feng Lee, Hyemin Ryu, Ji-Young Kim, Hojang Kim, Jaehoon Choi, Injong Oh, Gi‐Dong Sim
Topics & Concepts
Materials scienceShape-memory alloyThin filmCrystallinityAlloyCeramicSputteringComposite materialNickel titaniumElastic modulusDeflection (physics)NickelSputter depositionModulusMetallurgyNanotechnologyOpticsPhysicsShape Memory Alloy TransformationsMetal and Thin Film MechanicsFerroelectric and Piezoelectric Materials