Adaptive processing strategy of pulse ion beam for sub-nanometer precision optical components
Lingbo Xie, Ye Tian, Feng Shi, Shuangpeng Guo, Gang Zhou
Topics & Concepts
FiguringMachiningIon beamMaterials scienceBeam (structure)Duty cycleOpticsFocused ion beamIonEngineeringPhysicsElectrical engineeringVoltageQuantum mechanicsMetallurgyAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced Measurement and Metrology Techniques