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Influences of target power and pulse width on the growth of diamond-like/graphite-like carbon coatings deposited by high power impulse magnetron sputtering

Wei Dai, Xu Li, Liang Wu, Qimin Wang

2020Diamond and Related Materials20 citationsDOI

Topics & Concepts

High-power impulse magnetron sputteringMaterials scienceComposite materialDiamond-like carbonTribologyGraphiteRaman spectroscopyCoatingSputter depositionScanning electron microscopeTribometerAnalytical Chemistry (journal)SputteringNanotechnologyOpticsThin filmChemistryChromatographyPhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives
Influences of target power and pulse width on the growth of diamond-like/graphite-like carbon coatings deposited by high power impulse magnetron sputtering | Litcius