Microfabrication and nanotechnology in manufacturing system – An overview
Omolayo M. Ikumapayi, Esther T. Akinlabi, Adeyinka O.M. Adeoye, O.S. Fatoba
Topics & Concepts
MicrofabricationNanotechnologyPhotolithographyMicroelectromechanical systemsLithographyMaterials scienceEtching (microfabrication)Soft lithographyOptoelectronicsFabricationAlternative medicineMedicinePathologyLayer (electronics)Nanofabrication and Lithography TechniquesAdvanced Surface Polishing TechniquesMetal and Thin Film Mechanics