Microstructural characterization of BN thin films using RF magnetron sputtering method
Mukhtiar Singh, Hitesh Vasudev, Ravinder Kumar
Topics & Concepts
MicrostructureMaterials scienceBoron nitrideSputter depositionScanning electron microscopeFourier transform infrared spectroscopyAnalytical Chemistry (journal)SputteringPhase (matter)BoronNitrideThin filmCoatingChemical engineeringComposite materialLayer (electronics)NanotechnologyChemistryChromatographyOrganic chemistryEngineeringMetal and Thin Film MechanicsBoron and Carbon Nanomaterials ResearchDiamond and Carbon-based Materials Research