Recent Progress on Flexible Silicon Nanomembranes for Advanced Electronics and Optoelectronics
Ziyu Zhang, Yang Wang, Tianjun Cai, Binmin Wu, Bofan Hu, Xing Li, Enming Song, Gaoshan Huang, Ziao Tian, Zengfeng Di, Yongfeng Mei
Abstract
Abstract Silicon nanomembranes, an emerging material with ultrathin thickness, combine the electrical properties of semiconductors with the flexibility that bulk materials lack. These nanomembranes can impart enhanced functionality to devices, supporting development needs for next‐generation technologies “more‐than‐Moore” Law. In recent years, as research of fabrication techniques and fundamental principles have advanced, the focus of silicon nanomembrane studies has evolved from material preparation and component processing to functionalization and system‐level integration. This review begins with an overview of silicon nanomembrane preparation methods and formation principles. In terms of device advancements and applications, developments in optoelectronic devices, sensors, biomedicine, energy harvesting, and integrated circuits are covered. Finally, the review discusses the current challenges in silicon nanomembrane technology and the potential of silicon nanomembrane devices and systems in future optoelectronics, biomedicine, energy harvesting, and advanced integrated circuit architectures.