Effect of precursor stoichiometry on morphology, phase purity, and texture formation of hot filament CVD diamond films grown on Si (100) substrate

Raju Ahmed, Anwar Siddique, Rony Saha, Jonathan Anderson, Chris Engdahl, M. Holtz, E. L. Piner

2020Journal of Materials Science Materials in Electronics12 citationsDOI

Topics & Concepts

DiamondChemical vapor depositionMethaneTexture (cosmology)Materials scienceRaman spectroscopySubstrate (aquarium)Material properties of diamondStoichiometryAnalytical Chemistry (journal)Phase (matter)CrystalliteChemical engineeringComposite materialChemistryNanotechnologyOpticsMetallurgyPhysical chemistryOrganic chemistryEngineeringOceanographyPhysicsImage (mathematics)Artificial intelligenceComputer scienceGeologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices