Influence of metal electrodes on the irradiation resistance of HZO ferroelectric thin film capacitors and mechanism analysis
Shaoan Yan, Junyi Zang, Yingfang Zhu, Gang Li, Pei Xu, Zhuojun Chen, Sen Liu, Minghua Tang
Topics & Concepts
IrradiationFerroelectricityMaterials scienceCapacitorOptoelectronicsElectrodeEquivalent series resistanceThin filmPolarization (electrochemistry)Electrical engineeringDielectricVoltageNanotechnologyChemistryNuclear physicsPhysicsPhysical chemistryEngineeringFerroelectric and Negative Capacitance DevicesAdvanced Memory and Neural ComputingSemiconductor materials and devices