Chemical vapor deposition growth of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si1.svg"> <mml:mrow> <mml:mrow> <mml:mi mathvariant="bold">β</mml:mi> <mml:mo>‐</mml:mo> </mml:mrow> <mml:msub> <mml:mtext>Ga</mml:mtext> <mml:mn mathvariant="bold">2</mml:mn> </mml:msub> <mml:msub> <mml:mi mathvariant="bold">O</mml:mi> <mml:mn mathvariant="bold">3</mml:mn> </mml:msub> </mml:mrow> </mml:math> on Si- and C- face off-axis 4H–SiC at high temperature
Fatih Akyol, Hamdin Ozden
Topics & Concepts
Materials scienceChemical vapor depositionRaman spectroscopySubstrate (aquarium)Analytical Chemistry (journal)Full width at half maximumThermal conductivityCrystalliteNanotechnologyOptoelectronicsComposite materialOpticsMetallurgyPhysicsChemistryOceanographyGeologyChromatographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques