Surface acoustic wave relative humidity sensor based on GO/TiO2 sensitive film
Yawen Dou, Cuiping Li, Wensen Luo, Lirong Qian, Litian Wang, Dan Li, Hongji Li, Mingji Li
Topics & Concepts
Surface acoustic waveMaterials scienceRelative humidityResonatorOptoelectronicsGrapheneRepeatabilityWaferHumiditySputteringSensitivity (control systems)Thin filmAcousticsNanotechnologyElectronic engineeringChemistryEngineeringThermodynamicsChromatographyPhysicsGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsAcoustic Wave Resonator Technologies