Spatially-separated and photo-enhanced semiconductor corrosion processes for high-efficient and contamination-free electrochemical nanoimprint lithography
Hantao Xu, Lianhuan Han, Jian‐Jia Su, Zhong‐Qun Tian, Dongping Zhan
Topics & Concepts
Materials scienceCorrosionWaferNanoimprint lithographyResistAnodeSemiconductorOptoelectronicsCoatingNanotechnologyComposite materialElectrodeChemistryLayer (electronics)PathologyMedicinePhysical chemistryFabricationAlternative medicineNanofabrication and Lithography TechniquesAdvancements in Photolithography TechniquesNanowire Synthesis and Applications