Effect of nitrogen flow rate on the mechanical properties of (V,Mo)N thin films
Yiqun Feng, Tsai-Fu Chung, Jia‐Hong Huang
Topics & Concepts
Materials scienceMicrostructureThin filmAnalytical Chemistry (journal)Lattice constantNitrogenVolumetric flow rateGrain sizeSputter depositionSputteringComposite materialTexture (cosmology)DiffractionNanotechnologyOpticsChemistryThermodynamicsComputer scienceImage (mathematics)Artificial intelligenceOrganic chemistryChromatographyPhysicsMetal and Thin Film MechanicsSemiconductor materials and devicesDiamond and Carbon-based Materials Research