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One-to-one internal resonance in a symmetric MEMS micromirror

Andrea Opreni, M. Furlan, Andreea Bursuc, Nicolò Boni, Gianluca Mendicino, Roberto Carminati, Attilio Frangi

2022Applied Physics Letters16 citationsDOI

Abstract

Resonant modal interaction is a nonlinear dynamic phenomenon observed in structures excited at large vibration amplitudes. In the present work, we report the experimental evidence of a 1:1 internal resonance in a symmetric resonant micromirror. The experiments are complemented with a reduced model obtained from the 3D finite element discretization of the device by parametrizing the system motion along a low dimensional invariant set of the phase space. The presence of coupling monomials in the governing equations makes the resulting dynamics non-linearizable. Both model and experimental data show the existence of a complex pattern of multiple stable solutions for a given value of the excitation frequency.

Topics & Concepts

DiscretizationNonlinear systemPhysicsResonance (particle physics)VibrationExcitationCoupling (piping)Excited stateClassical mechanicsMicroelectromechanical systemsAmplitudeInvariant (physics)Phase spaceFinite element methodEquations of motionNonlinear resonanceMathematical analysisOpticsAcousticsAtomic physicsMathematicsQuantum mechanicsMaterials scienceMetallurgyThermodynamicsMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesBladed Disk Vibration Dynamics
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