Sacrificial layer-assisted one-step transfer printing for fabricating a three-layer dry electrode
Junshan Liu, Yue Zhang, Shan Han, Liping Qi, Hong Yan Tang, Hongji Guo, Zhe Liu, X Hu, Zheng Xu, Chong Liu
Topics & Concepts
Layer (electronics)ElectrodeMaterials scienceWaferDry etchingEtching (microfabrication)Transfer printingPhotolithographyOptoelectronicsPolyimideComposite materialNanotechnologyChemistryPhysical chemistryAdvanced Sensor and Energy Harvesting MaterialsTactile and Sensory InteractionsNeuroscience and Neural Engineering