Optimized magnetron sputtering process for the deposition of gadolinia doped ceria layers with controlled structural properties
Martin Mickan, Pierre Coddet, Julien Vulliet, Amaël Caillard, Thierry Sauvage, Anne‐Lise Thomann
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Materials scienceStoichiometrySputter depositionSubstrate (aquarium)SputteringAnnealing (glass)OxideDeposition (geology)Cavity magnetronAnalytical Chemistry (journal)OxygenDopingThin filmChemical engineeringVolumetric flow rateMetallurgyNanotechnologyOptoelectronicsChemistryPhysical chemistryEngineeringSedimentQuantum mechanicsPhysicsPaleontologyGeologyOceanographyOrganic chemistryChromatographyBiologyElectronic and Structural Properties of OxidesCatalytic Processes in Materials ScienceAdvancements in Solid Oxide Fuel Cells