Monolithic GaN optoelectronic system on a Si substrate
Hao Zhang, Jiabin Yan, Ziqi Ye, Fan Shi, Jinlong Piao, Wei Wang, Xumin Gao, Hongbo Zhu, Yongjin Wang, Yuhuai Liu, Hiroshi Amano
Abstract
GaN-based devices have grown rapidly in recent decades, due to their important research value and application prospects. There is a desire to monolithically integrate different GaN devices into a single chip for the development of future optoelectronic systems with low power consumption. In addition to improved multifunctional performance, a miniature integrated system can result in a significant reduction in material costs, processing costs, and packaging costs. In view of such prospects, we propose monolithic, top-down approaches to build III-nitride transmitter, modulator, waveguide, beam splitter, receiver, and monitor as a single unit onto a conventional GaN-on-silicon wafer without involving regrowth or postgrowth doping. Data communication among these components is realized through light propagation, opening up horizons for GaN optoelectronic systems on a chip.