Litcius/Paper detail

Theoretical Model of Thermal Stress in the Film-Substrate System of Optical Thin Film

Yunyun Shi, Junqi Xu, Yang Li, Zheng Liu, Kaifeng Zhang, Junhong Su

2022Journal of Electronic Materials11 citationsDOIOpen Access PDF

Topics & Concepts

Materials scienceSubstrate (aquarium)Residual stressComposite materialStress (linguistics)Layer (electronics)Thin filmDouble layer (biology)Thermal expansionOpticsNanotechnologyOceanographyPhysicsPhilosophyGeologyLinguisticsOptical Coatings and GratingsCopper Interconnects and ReliabilitySemiconductor materials and devices