Neural network assisted multi-parameter global sensitivity analysis for nanostructure scatterometry
Kai Meng, Bo Jiang, Kamal Youcef‐Toumi
Topics & Concepts
NanostructureSensitivity (control systems)Artificial neural networkMaterials scienceNanotechnologyBiological systemComputer scienceArtificial intelligenceEngineeringElectronic engineeringBiologyOptical Coatings and GratingsElectromagnetic Simulation and Numerical MethodsNumerical methods in engineering