Non-periodic nanoscale structuring of crystalline silicon surface by using ultrashort laser pulses
Byunggi Kim, Han Ku Nam, Jeongchun Ryu, Young‐Jin Kim, Seung‐Woo Kim
Topics & Concepts
Materials scienceSurface plasmon polaritonOpticsWaferSiliconCrystalline siliconDiffractionLaserNanoscopic scaleOptoelectronicsSurface plasmonUltrashort pulseLaser linewidthPlasmonNanotechnologyPhysicsLaser Material Processing TechniquesSilicon Nanostructures and PhotoluminescenceAdvanced Surface Polishing Techniques