DMWMNet: A novel dual-branch multi-level convolutional network for high-performance mixed-type wafer map defect detection in semiconductor manufacturing
Xiangyan Zhang, Zhong Jiang, Hong Yang, Yadong Mo, Linkun Zhou, Ying Zhang, Jian Li, Shimin Wei
Topics & Concepts
WaferSemiconductor device fabricationDual (grammatical number)SemiconductorWafer fabricationComputer scienceEngineeringMaterials scienceOptoelectronicsArtLiteratureIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Surface Polishing Techniques