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On the origin of nanoripples on silicon by gas cluster-ion irradiation

Д.С. Киреев, M.O. Ryabtsev, A. A. Tatarintsev, A.E. Ieshkin

2022Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms10 citationsDOI

Topics & Concepts

IrradiationCluster (spacecraft)SiliconFluenceMaterials scienceIonIon beamAtomic physicsChemical physicsOptoelectronicsChemistryPhysicsNuclear physicsProgramming languageOrganic chemistryComputer scienceIon-surface interactions and analysisIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials Research
On the origin of nanoripples on silicon by gas cluster-ion irradiation | Litcius