Improvement of Ag films with highly (111) surface orientation for metal direct bonding technique: Nanotwinned structure and ion bombardment effect
Leh-Ping Chang, Jianjie Wang, Fan-Yi Ouyang
Topics & Concepts
Materials scienceMetalIonSurface structureOrientation (vector space)Surface (topology)CrystallographyMetallurgyChemistryGeometryOrganic chemistryMathematicsCopper Interconnects and ReliabilityElectronic Packaging and Soldering TechnologiesMetal and Thin Film Mechanics