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Optimization of residual stresses inside diamond thin films grown by hot filament chemical vapor deposition (HFCVD)

Mike Kh. Haddad, Onur Kurtulus, M. Mertens, Kai Brühne, P. Gluche, H.‐J. Fecht

2022Diamond and Related Materials14 citationsDOI

Topics & Concepts

Chemical vapor depositionDiamondMaterials scienceResidual stressMicrocrystallineThin filmComposite materialCarbon filmUltimate tensile strengthNanotechnologyChemistryCrystallographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced Surface Polishing Techniques
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