Effect of target grain size on target sputter etching morphology and performance
Shuai-Kang Wang, Wenhao Yang, Yu-Peng Wang, Guohua Zhao, Shang-Song Zhan, Duo Wang, Bin Tang, Mingdong Bao
Topics & Concepts
SputteringGrain sizeMaterials scienceEtching (microfabrication)Grain boundaryMorphology (biology)OptoelectronicsComposite materialMetallurgyMicrostructureNanotechnologyThin filmGeologyLayer (electronics)PaleontologyMetal and Thin Film MechanicsIon-surface interactions and analysisPlasma Diagnostics and Applications