Atomic-layer-deposited SnO film using novel Sn(dmamb)2 precursor for p-channel thin film transistor
Myeong Gil Chae, Seong Ho Han, Bo Keun Park, Taek‐Mo Chung, Jeong Hwan Han
Topics & Concepts
Amorphous solidMaterials scienceThin-film transistorAnnealing (glass)Thin filmTinAtomic layer depositionSaturation (graph theory)Layer (electronics)FabricationChemical engineeringNanotechnologyAnalytical Chemistry (journal)CrystallographyChemistryMetallurgyOrganic chemistryPathologyCombinatoricsEngineeringMathematicsMedicineAlternative medicineZnO doping and propertiesElectronic and Structural Properties of OxidesSemiconductor materials and devices