Enhancement of thermoelectric performance of N-type Bi2Te3 based thin films via in situ annealing during magnetron sputtering
Zhuchen He, Yuexing Chen, Zhuanghao Zheng, Fu Li, Guangxing Liang, Jingting Luo, Ping Fan
Topics & Concepts
Materials scienceAnnealing (glass)Seebeck coefficientThermoelectric effectSputter depositionThin filmSputteringGrain sizeCavity magnetronOptoelectronicsElectrical resistivity and conductivityThermoelectric materialsComposite materialMetallurgyNanotechnologyThermal conductivityElectrical engineeringThermodynamicsPhysicsEngineeringAdvanced Thermoelectric Materials and DevicesThermal Radiation and Cooling TechnologiesAdvanced Thermodynamics and Statistical Mechanics