Improved emitter performance of RIE black silicon through the application of in-situ oxidation during POCl3 diffusion
Tsun Hang Fung, Toni P. Pasanen, Yu Zhang, Anastasia Soeriyadi, Ville Vähänissi, Giuseppe Scardera, D.N. Payne, Hele Savin, Malcolm Abbott
Topics & Concepts
Common emitterPassivationBlack siliconMaterials scienceOptoelectronicsSiliconSaturation currentDiffusionNanotechnologyVoltageElectrical engineeringEngineeringThermodynamicsLayer (electronics)PhysicsSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence