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Performance degradation and reliability analysis of a MEMS flow sensor with accelerated degradation testing

Qiaoqiao Kang, Yuzhe Lin, Jifang Tao

2023Microelectronics Reliability12 citationsDOI

Topics & Concepts

Degradation (telecommunications)Reliability (semiconductor)Weibull distributionResidualMicroelectromechanical systemsAccelerated life testingStress (linguistics)Reliability engineeringMaterials scienceStatisticsComputer scienceMathematicsElectronic engineeringEngineeringAlgorithmPower (physics)PhysicsThermodynamicsLinguisticsPhilosophyOptoelectronicsSensor Technology and Measurement SystemsAdvanced Sensor Technologies ResearchScientific Measurement and Uncertainty Evaluation
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