A snapshot review on metal–semiconductor contact exploration for 7-nm CMOS technology and beyond
Hao Yu, Marc Schaekers, Jean-Luc Everaert, Naoto Horiguchi, K. De Meyer, Nadine Collaert
Topics & Concepts
Materials scienceCMOSSnapshot (computer storage)SemiconductorTransistorOptoelectronicsContact resistanceEngineering physicsElectrical contactsBack end of lineNanotechnologyElectrical engineeringComputer scienceEngineeringVoltageDielectricLayer (electronics)Operating systemSemiconductor materials and interfacesIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devices