A novel growth model for depositing ultrananocrystalline diamond films in CH4/H2 chemistry
Qiang Lin, Sulin Chen, Zhe Ji, Zhewei Huang, Zhinan Zhang, Bin Shen
Topics & Concepts
NucleationChemical vapor depositionMaterials scienceDiamondNanotechnologyDeposition (geology)Growth rateThin filmChemical engineeringKinetic energyHydrogenChemical physicsComposite materialChemistryOrganic chemistryQuantum mechanicsBiologyMathematicsSedimentPaleontologyGeometryPhysicsEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsForce Microscopy Techniques and Applications