Atomic-level insights into CeO2 performance: Chemical interactions in CMP explored through CeO2-SiO2 studies
Ravitej Venkataswamy, Lyle Trimble, Seokgyu Ryu, Ngoc-Tram Le, Kyungju Park, Hyun-Goo Kang, Jihoon Seo
Topics & Concepts
Materials scienceChemical-mechanical planarizationNanotechnologyLayer (electronics)Catalytic Processes in Materials ScienceElectronic and Structural Properties of OxidesAdvanced materials and composites