P-type β-Ga2O3 films were prepared by Zn-doping using RF magnetron sputtering
Dafang Wang, Kunpeng Ge, Dongdong Meng, Zhengwei Chen
Topics & Concepts
Materials scienceDopingDopantSputter depositionAnalytical Chemistry (journal)Photoelectric effectDark currentSputteringConductivityCavity magnetronHall effectElectrical resistivity and conductivityPhotodetectorOptoelectronicsThin filmNanotechnologyChromatographyElectrical engineeringPhysical chemistryEngineeringChemistryGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques