Chemical etching of glasses in hydrofluoric Acid: A brief review
Shubhava, A. Jayarama, Ganesh K. Kannarpady, S. N. Kale, S. S. Prabhu, R. Pinto
Topics & Concepts
Hydrofluoric acidEtching (microfabrication)MicrostructureMaterials scienceAbrasiveReactive-ion etchingQuartzIsotropic etchingDry etchingAcid etchingNanotechnologyComposite materialMineralogyMetallurgyChemistryLayer (electronics)Analytical Chemistry and SensorsGas Sensing Nanomaterials and SensorsElectrowetting and Microfluidic Technologies